Shower Head

Plate Perf.

Face Plate

Blocker Plate

GDP (Gas Distribution Plate)

可提供P/N: 

0020-10117,  Plate,Perf, OX 200mm TEOS         
0020-10122,  Plate Perf 125mm Oxide
0020-10123,  Plate, Perf Narrow, Nitride 200mm        
0020-10771,  Plate, Perf, 150mm OX
0020-30086,  Plate, Perf, GIANT GAP Nitride      
0020-31488,  Gas Distribution Plate, 13 Hole
0020-31492,  Gas Distribution Plate, 101 Hole      
0020-34445,  Plate, Blocker, DxZ
0020-42284,  Plate 6" Blocker, EC WxZ          
0020-42286,  Plate Perf 6", EC WxZ
0020-44453,  Blocker TEOS, 300SE, 300mm Producer          
0020-48972,  Face Plate, LowK, XTRA Row Extending, 300mm Producer SE
0020-51923,  FacePlate, Silane NIT, 300mm Producer      
0020-62625,  FacePlate, BLOK, Low K, PPC MFG+LSA CP, 300mm Producer SE
0021-00041,  Face Plate, SiN XG, DxZ DCVD
0021-00042,  Face Plate, TEOS DxZ DCVD
0021-01569,  Blocker Plate, He/N2 GIGA-Fill SACVD
0021-01572,  Face Plate, GIGA-Fill SACVD BPSG CENT 23
0021-01598,  Face Plate, Nickel, Ti-xZ
0021-03637,  Face Plate, Silane Producer 200mm
0021-15200,  FacePlate, BLOK & Hardmask 200mm Producer
0021-35087,  Plate, Blocker N2-Carrier (EH)
0021-38119,  Face Plate, DxZ, DCVD, Center Hole
0040-95475,  Face Plate, ZDK90, HIGHDEPRATE, TEOS
70055-00907E,  Shower Plate
70055-00817E,  Shower Plate
70055-70983,    Shower Plate
73055-01626A, Shower Plate 12"